Technology
Photonics

Business Activity
AIXUV develops and produces compact, user friendly EUV radiation sources for laboratory applications as well as customer-specific EUV systems and offers R&D services and components with respect to the use of short-wave radiation (XUV, EUV).

Products and Services 
The core product is the discharge-based EUV source developed by AIXUV and patented worldwide through Fraunhofer-Gesellschaft. Based on this innovation, AIXUV develops and realizes customized test and measuring systems such as reflectometers and (nano) photoresist exposers.